EB nano fabrication - 電子線描画装置のクレステック

●Major examples of EB NANO FABRICATION SERVICE

■3D Pattern Writing Method Blazed Grating

Blazed Grating by changing dose amount

■3D Concentric Circular Pattern

Smooth surface of blazed Grating.

■2D Photonic Crystals

Dot patterns by spot scan method.

■Hexagonal Grating

　Each dot size is 60nmφ

■Computer Generated Hologram

Magnification ： × 170(R)
Magnification ： × 85(L)

Hologram Pattern by Raster scan method. The pixel size is 1.25um.

For customers who try new applications, CRESTEC will provide solutions. Please call us for more information.