クレステックは徹底したマーケットイン志向の電子線描写技術を専門としたナノテク企業です。
CRESTEC, EB Lithography manufacturer > Products > CSEL(Surface emission EB)

Surface Emission Ballistic  EB Exposure System

 
As a post 22nm node solution, this Surface Emission Ballistic EB Exposure System as an "EB stepper" has been expected to be released to the market soon. Crestec has been improving the resolution and hoping to release it to the market in near future.